Post by christina on Mar 1, 2024 4:30:15 GMT -5
full text: www.ericcointernational.com/application/static-capacitance-test-of-mems-tilt-sensor.html
1. Performance test content
The main indicators of the MEMS tilt sensor sensor chip include static capacitance, static performance test and dynamic performance test. The static performance test includes measurement range, sensitivity, linearity, transverse sensitivity and zero stability. The dynamic performance test is mainly the bandwidth test.
1.1 Static capacitance test
The static capacitance test was performed using wafer probe bench and Agilent 4294A impedance analyzer, as shown in Figure 4.10, mainly for screening MEMS tilt sensor sensitive chips before packaging.
1. Performance test content
The main indicators of the MEMS tilt sensor sensor chip include static capacitance, static performance test and dynamic performance test. The static performance test includes measurement range, sensitivity, linearity, transverse sensitivity and zero stability. The dynamic performance test is mainly the bandwidth test.
1.1 Static capacitance test
The static capacitance test was performed using wafer probe bench and Agilent 4294A impedance analyzer, as shown in Figure 4.10, mainly for screening MEMS tilt sensor sensitive chips before packaging.