How does MEMS gyroscope work?

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When an object with an initial angular velocity makes straight motion in a rotating coordinate system, its motion trajectory is a straight line. But for the inertial coordinate system, the movement trajectory of the object will deviate to a certain extent, because the moving object will be interfered by external force. This force is called Coriolis force, which is perpendicular to the direction of movement of the object. Therefore, MEMS gyroscopes use the Coriolis force to measure the angular rate of an object.


As can be seen from the figure, the object m is moving uniformly along the X axis, its velocity is v, and the object m itself is rotating around the Z axis, its angular rate is Ωz.

MEMS gyroscope contains a vibrating block and a flexible spring inside. MEMS gyro rotates around the Z-axis, and the vibrating block vibrates, so that the Coriolis force is generated. When the MEMS gyro starts to move, the capacitive detection sensor on the vibrating block will generate energy transfer, causing changes in the electrochemical quantity. It can be seen from Figure 3 that the mass blocks on both sides of the spring move around the Z-axis at the same time. They are both affected by the Coriolis force and the directions of their forces are opposite.


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