Post by kellyyu on Nov 16, 2023 4:32:48 GMT -5
MEMS gyroscope is an inertial sensor, which is a small device that measures angular velocity or rotation rate. It can play a role in aerospace, drones and other fields, and is also used in navigation systems to detect changes in direction and measure pitch, roll and yaw. At the same time, it can also be used in fields such as petroleum logging and mining, providing north-finding solutions, pointing and initial alignment, etc.
◾ Disadvantages of MEMS gyroscope
1. Output results need to be controlled and compensated
Generally, MEMS gyroscopes are designed so that both the driving mode and the sensing mode can reach resonance, or both modes can be resonated through electronic tuning. However, although appropriately increasing the frequency peak spacing between the driving mode and the sensing mode can reduce frequency drift caused by changes in system parameters, the response output still requires advanced control methods and signal processing to compensate.
2. Immaturity of photolithography technology and microfabrication processing
Today, photolithography technology and microfabrication processing are still immature, which limits the perfect manufacturing of high-performance inertial sensors including MEMS gyroscopes. And the inherent errors in the manufacturing of its mechanical structure limit the performance, stability and sensitivity of MEMS gyros. The requirement of modal matching causes the dynamic characteristics of MEMS gyros, such as resonance frequency and sensitivity, to deviate drastically from the expected design values, and the various performance indicators of the same MEMS gyros produced in each batch are also different. These errors are caused by deviations in the photolithography steps and processes as well as the presence of deposition conditions and residual stress.
3. Affected by temperature changes
Changes in temperature also affect the dimensions of the structure, thus destroying the accuracy of the actual dynamic system parameters.
However, experts have done a lot of research on reducing errors in gyroscope measurements, such as studying the design of symmetrical suspension systems, which can improve better modal matching and reduce temperature drift. With the increasing advancement of science and technology, MEMS technology is making breakthroughs and changes every day, and will better match the needs of the market in the future.
◾ Advantages of MEMS gyroscope
Has shown in the reference
Contact me:
Email: info@ericcointernational.com
Whatsapp: 173 9198 8506
◾ Disadvantages of MEMS gyroscope
1. Output results need to be controlled and compensated
Generally, MEMS gyroscopes are designed so that both the driving mode and the sensing mode can reach resonance, or both modes can be resonated through electronic tuning. However, although appropriately increasing the frequency peak spacing between the driving mode and the sensing mode can reduce frequency drift caused by changes in system parameters, the response output still requires advanced control methods and signal processing to compensate.
2. Immaturity of photolithography technology and microfabrication processing
Today, photolithography technology and microfabrication processing are still immature, which limits the perfect manufacturing of high-performance inertial sensors including MEMS gyroscopes. And the inherent errors in the manufacturing of its mechanical structure limit the performance, stability and sensitivity of MEMS gyros. The requirement of modal matching causes the dynamic characteristics of MEMS gyros, such as resonance frequency and sensitivity, to deviate drastically from the expected design values, and the various performance indicators of the same MEMS gyros produced in each batch are also different. These errors are caused by deviations in the photolithography steps and processes as well as the presence of deposition conditions and residual stress.
3. Affected by temperature changes
Changes in temperature also affect the dimensions of the structure, thus destroying the accuracy of the actual dynamic system parameters.
However, experts have done a lot of research on reducing errors in gyroscope measurements, such as studying the design of symmetrical suspension systems, which can improve better modal matching and reduce temperature drift. With the increasing advancement of science and technology, MEMS technology is making breakthroughs and changes every day, and will better match the needs of the market in the future.
◾ Advantages of MEMS gyroscope
Has shown in the reference
Contact me:
Email: info@ericcointernational.com
Whatsapp: 173 9198 8506